In order and together with the company INTEGA GmbH the engineering office IMBUS develops and constructs a test facility for spring bellows.
These are used in optical devices of the semiconductor industry for the Chip production.
A goal is it, to seize parameters highly exactly such as force and expansion. So the axial stiffness and surface can be calculated, which specify the reaction of the bellow. For this test facility, sensor system for distance-, force- and pressure measurement will be used, which push to the borders of the feasible measuring accuracies.